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61. 发明授权

US08321959B2 Cantilevers with integrated piezoelectric actuators for probe microscopy 有权
标题翻译：具有集成压电致动器的悬臂用于探针显微镜
公开(公告)号：US08321959B2
公开(公告)日：2012-11-27
申请号：US12853011
申请日：2010-08-09
申请人： Fahrettin Levent Degertekin
发明人： Fahrettin Levent Degertekin
IPC分类号： G01Q10/00 , G01Q20/00 , G01Q20/02 , G01Q20/04 , G01Q60/24
CPC分类号： G01Q20/04 , G01Q10/045 , G01Q60/38
摘要： An atomic force microscopy sensor includes a substrate, a cantilever beam and an electrostatic actuator. The cantilever beam has a proximal end and an opposite distal end. The proximal end is in a fixed relationship with the substrate and the cantilever beam is configured so that the distal end is in a moveable relationship with respect to the substrate. The electrostatic actuator includes a first electrode that is coupled to the cantilever beam adjacent to the proximal end and a spaced apart second electrode that is in a fixed relationship with the substrate. When an electrical potential is applied between the first electrode and the second electrode, the first electrode is drawn to the second electrode, thereby causing the distal end of the cantilever beam to move.
摘要翻译：原子力显微镜传感器包括基底，悬臂梁和静电致动器。悬臂梁具有近端和相对的远端。近端与衬底处于固定关系，并且悬臂梁被配置为使得远端相对于衬底处于可移动的关系。静电致动器包括耦合到邻近近端的悬臂梁的第一电极和与衬底成固定关系的间隔开的第二电极。当在第一电极和第二电极之间施加电势时，第一电极被拉到第二电极，从而使悬臂梁的远端移动。

62. 发明授权

US08141168B2 Scanning probe microscope and a method to measure relative-position between probes 有权
标题翻译：扫描探针显微镜和测量探针之间相对位置的方法
公开(公告)号：US08141168B2
公开(公告)日：2012-03-20
申请号：US12374775
申请日：2007-07-27
申请人： Tomonobu Nakayama , Seiji Higuchi
发明人： Tomonobu Nakayama , Seiji Higuchi
IPC分类号： G01Q10/00 , G01Q20/00
CPC分类号： G01Q10/06 , G01Q30/04 , G01Q70/06
摘要： A main object of the present claimed invention is to provide a scanning probe microscope that can recognize a relative position between multiple probes accurately. The scanning probe microscope comprises multiple probes 21, 22, 23, 24 movable in the XYZ-directions, a stage 3 on which a specimen W is placed and that is movable in the XY-directions, a detecting part 6 that detects the physical properties that changes with the movements of each of the probes 21, 22, 23, 24 in the Z-direction according to the surface shape of the specimen W, at a time when each of the probes 21, 22, 23, 24 or the stage 3 is moved in the XY-directions, an image generating part 73 that images the surface image of the specimen W in response to the detected signals from the detecting part 6, and a relative position calculating part 75 that obtains the surface image based on each of the probes 21, 22, 23, 24 and obtained by the image generating part 73, when the stage 3 is moved in the XY-directions without changing a relative position between the probes 21, 22, 23 24 in the XY-directions, and calculates the relative position between the probes 21, 22, 23, 24 by checking the surface images obtained by the probes.
摘要翻译：本发明的主要目的是提供一种可以精确识别多个探头之间的相对位置的扫描探针显微镜。扫描探针显微镜包括可沿XYZ方向移动的多个探针21,22,23,24，放置有试样W并且可沿XY方向移动的载物台3，检测物体的物理性质的检测部分6 随着探针21,22,23,24的每一个在探针21,22,23,24或台阶中的每个探针21,22,23,24在Z方向上根据样本W的表面形状的移动而变化 3在XY方向上移动，响应于来自检测部分6的检测信号对样本W的表面图像进行成像的图像生成部分73以及基于每个图像获得表面图像的相对位置计算部分75 的探头21,22,23,24，由图像生成部73获得，当台架3在XY方向上移动而不改变探针21,22,23,24之间在XY方向上的相对位置时，并通过检查来计算探针21,22,23,24之间的相对位置通过探针获得的表面图像。

63. 发明申请

US20110041223A1 SPATIALLY RESOLVED QUANTITATIVE MAPPING OF THERMOMECHANICAL PROPERTIES AND PHASE TRANSITION TEMPERATURES USING SCANNING PROBE MICROSCOPY 有权
标题翻译：使用扫描探针显微镜空间分辨温度特性和相变过渡温度的定量映射
公开(公告)号：US20110041223A1
公开(公告)日：2011-02-17
申请号：US12857894
申请日：2010-08-17
申请人： Stephen Jesse , Sergei V. Kalinin , Maxim P. Nikiforov
发明人： Stephen Jesse , Sergei V. Kalinin , Maxim P. Nikiforov
IPC分类号： G01Q20/00
CPC分类号： G01Q60/58
摘要： An approach for the thermomechanical characterization of phase transitions in polymeric materials (polyethyleneterephthalate) by band excitation acoustic force microscopy is developed. This methodology allows the independent measurement of resonance frequency, Q factor, and oscillation amplitude of a tip-surface contact area as a function of tip temperature, from which the thermal evolution of tip-surface spring constant and mechanical dissipation can be extracted. A heating protocol maintained a constant tip-surface contact area and constant contact force, thereby allowing for reproducible measurements and quantitative extraction of material properties including temperature dependence of indentation-based elastic and loss moduli.
摘要翻译：开发了通过频带激发声力显微镜对聚合物材料（聚对苯二甲酸乙二醇酯）中的相变的热机械表征的方法。该方法允许独立测量作为尖端温度的函数的尖端表面接触面积的谐振频率，Q因子和振荡振幅，从而可以提取尖端表面弹簧常数和机械耗散的热演变。加热方案保持了不变的顶表面接触面积和恒定的接触力，从而允许重复测量和定量提取材料性能，包括基于压痕的弹性和损耗模量的温度依赖性。

64. 发明申请

US20100132075A1 Self displacement sensing cantilever and scanning probe microscope 有权
标题翻译：自动位移检测悬臂和扫描探针显微镜
公开(公告)号：US20100132075A1
公开(公告)日：2010-05-27
申请号：US12592428
申请日：2009-11-24
申请人： Masato Iyoki , Naoya Watanabe
发明人： Masato Iyoki , Naoya Watanabe
IPC分类号： G01Q20/02 , G01Q20/00
CPC分类号： G01Q20/04 , G01Q30/025 , G01Q70/14
摘要： Provided is a self displacement sensing cantilever, including: a cantilever (4) that has a probe (2) at its tip and has a distal end portion (3) at its distal end; a displacement detecting portion (5) that is provided to the cantilever (4), for detecting a displacement of the cantilever (4); an electrode portion (6) that is connected to the displacement detecting portion (5) and is communicated with the distal end portion (3); and an insulation film (7) that is formed over at least one of the electrode portion (6) and the displacement detecting portion (5) of the cantilever (4), in which the insulation film (7) is applied a coating of an arbitrary functional material (8). As a result, measurement with a scanning probe microscope may be performed at the same time as projecting light.
摘要翻译：本发明提供一种自移位检测悬臂，包括：悬臂（4），其顶端具有探针（2），并在其远端具有远端部分（3）; 位移检测部（5），其设置在所述悬臂（4）上，用于检测所述悬臂（4）的位移; 与所述位移检测部（5）连接并与所述前端部（3）连通的电极部（6）。以及形成在所述悬臂（4）的所述电极部（6）和所述位移检测部（5）中的至少一个上的绝缘膜（7），其中所述绝缘膜（7）被涂覆在所述悬臂任意功能材料（8）。结果，可以在与投射光同时进行扫描探针显微镜的测量。

65. 发明申请

US20100100989A1 PIEZORESISTOR HEIGHT SENSING CANTILEVER 失效
公开(公告)号：US20100100989A1
公开(公告)日：2010-04-22
申请号：US12465625
申请日：2009-05-13
申请人： Joseph S. Fragala , Albert K. Henning , Raymond R. Shile
发明人： Joseph S. Fragala , Albert K. Henning , Raymond R. Shile
IPC分类号： G01Q20/00 , H01C7/00 , G01L1/00 , G01Q70/00 , G01Q70/16
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A device comprising at least one cantilever comprising at least one piezoresistor is described, where the cantilevers comprise silicon nitride or silicon carbide and the piezoresistors comprise doped silicon. Methods for making and using such a device are also provided.
摘要翻译：描述了包括至少一个包括至少一个压敏电阻的悬臂的装置，其中悬臂包括氮化硅或碳化硅，并且压电电阻包括掺杂的硅。还提供了制造和使用这种装置的方法。

66. 发明授权

US06936981B2 Retarding electron beams in multiple electron beam pattern generation 失效
标题翻译：在多个电子束图案生成中阻止电子束
公开(公告)号：US06936981B2
公开(公告)日：2005-08-30
申请号：US10291292
申请日：2002-11-08
申请人： Mark Alan Gesley
发明人： Mark Alan Gesley
IPC分类号： G01Q20/00 , G01Q30/02 , H01J25/00 , H01J37/00 , H01J37/28 , H01J37/30 , H01J37/317
CPC分类号： H01J37/3177 , H01J2237/04756 , H01J2237/31779
摘要： A multiple electron beam pattern generator includes a multiple electron beam source to generate a plurality of electron beams that are modulated according to a pattern. An anode accelerates the electron beams, and then a beam retarding system generates a retarding electric potential about the electron beams to decrease the kinetic energy of the electron beams substantially near a substrate. A beam scanner scans the electron beams across the substrate. A substrate support supports the substrate, and a pattern is generated on the substrate.
摘要翻译：多电子束图案发生器包括多电子束源，以产生根据图案调制的多个电子束。阳极加速电子束，然后光束延迟系统围绕电子束产生延迟电位，以降低基本上靠近衬底的电子束的动能。光束扫描器扫描跨越衬底的电子束。衬底支撑件支撑衬底，并且在衬底上产生图案。

67. 发明授权

US06924489B2 Device for reducing the impact of distortions in a microscope 有权
标题翻译：用于减少显微镜中畸变影响的装置
公开(公告)号：US06924489B2
公开(公告)日：2005-08-02
申请号：US10756726
申请日：2004-01-13
申请人： Håkan Olin , Drister Svensson , Fredrik Althoff , Andrey Danilov , Paul Bengtsson , Martin Hospers
发明人： Håkan Olin , Drister Svensson , Fredrik Althoff , Andrey Danilov , Paul Bengtsson , Martin Hospers
IPC分类号： G01Q20/00 , G01Q30/20 , G01Q60/00 , H01J37/20 , H01J37/26
CPC分类号： H01J37/20 , Y10S977/872
摘要： This invention relates to a device for reducing the impact of undesired distortions when studying a sample in an electron microscope, wherein said sample is arranged to be mounted on a micro-positioning device, characterised in that said micro-positioning device is connected with a control device, being arranged to control said micro-positioning device so as to compensate for measurement errors due to undesired distortions.
摘要翻译：本发明涉及一种用于在电子显微镜中研究样品时减少不期望的失真的影响的装置，其中所述样品被布置成安装在微型定位装置上，其特征在于，所述微型定位装置与控制装置，被布置成控制所述微定位装置，以补偿由于不期望的失真引起的测量误差。

68. 发明申请

US20050103996A1 Measurement device for electron microscope 有权
标题翻译：电子显微镜测量装置
公开(公告)号：US20050103996A1
公开(公告)日：2005-05-19
申请号：US10843662
申请日：2004-05-12
申请人： Hakan Olin , Krister Svensson , Fredrik Althoff , Andrey Danilov
发明人： Hakan Olin , Krister Svensson , Fredrik Althoff , Andrey Danilov
IPC分类号： G01L5/00 , G01B21/30 , G01N23/04 , G01Q20/00 , G01Q20/02 , G01Q20/04 , G01Q60/24 , H01J37/20 , H01J37/26 , G01N23/00
CPC分类号： G01Q30/02 , G01Q20/02 , G01Q20/04 , G01Q60/366 , H01J37/20 , H01J37/26 , H01J2237/2583
摘要： This invention relates to a measurement device for use in an electron microscope. The device comprises a sample holder, for holding a sample to be studied, and an indentation tip, being arranged in proximity of the sample holder, whereby an interaction between the sample and the tip is arranged to be measured. The measurement device comprises a force sensor being positioned in proximity with an interaction area of the sample and the tip and is arranged to directly measure a force resulting from interaction between the sample and the tip.
摘要翻译：本发明涉及一种用于电子显微镜的测量装置。该装置包括用于保持要研究的样品的样品保持器和布置在样品保持器附近的凹陷末端，由此将样品和尖端之间的相互作用布置成被测量。测量装置包括力传感器，该力传感器定位在样品和尖端的相互作用区域附近，并且被布置成直接测量由样品和尖端之间的相互作用产生的力。

69. 发明授权

US06890772B2 Method and apparatus for determining two dimensional doping profiles with SIMS 失效
标题翻译：用SIMS确定二维掺杂分布的方法和装置
公开(公告)号：US06890772B2
公开(公告)日：2005-05-10
申请号：US10043734
申请日：2002-01-09
申请人： Chin-Kai Liu , Jun-Yean Chiou , Pei-Fen Chou , Han-Shun Lui
发明人： Chin-Kai Liu , Jun-Yean Chiou , Pei-Fen Chou , Han-Shun Lui
IPC分类号： G01J1/00 , G01Q20/00 , G01R31/26 , G01T1/24 , H01L21/66
CPC分类号： H01L22/34 , H01L22/14
摘要： A method of forming a SIMS monitor device for determining a doping profile of a semiconductor device structure including providing a plurality of regularly repeating semiconductor structures including a doping profile to form a monitor device including at least one layer of the regularly repeating semiconductor structures; planarizing the monitor device through a thickness of the regularly repeating semiconductor structures to reveal a target surface overlying the doping profile to form a monitor pattern; and, sputtering the target surface over a sputtering area including the monitor pattern through a thickness thereof while simultaneously detecting and counting over a time interval at least one type of species ejected from the target surface according to a secondary ion mass spectroscopy procedure (SIMS).
摘要翻译：一种形成用于确定半导体器件结构的掺杂分布的SIMS监视器件的方法，包括提供包括掺杂分布的多个规则重复的半导体结构，以形成包括至少一层规则重复的半导体结构的监测器件; 通过规则重复的半导体结构的厚度来平坦化监视器装置，以显示覆盖掺杂分布的目标表面以形成监视图案; 并且通过其厚度在包括监视器图案的溅射区域上溅射目标表面，同时根据二次离子质谱法（SIMS）从目标表面喷射的至少一种类型的物质同时检测和计数。

70. 发明授权

US06877365B2 Scanning probe microscope and specimen observation method and semiconductor device manufacturing method using said scanning probe microscope 失效
标题翻译：扫描探针显微镜和样本观察方法以及使用所述扫描探针显微镜的半导体器件制造方法
公开(公告)号：US06877365B2
公开(公告)日：2005-04-12
申请号：US10340517
申请日：2003-01-09
申请人： Masahiro Watanabe , Toshihiko Nakata
发明人： Masahiro Watanabe , Toshihiko Nakata
IPC分类号： G01B21/16 , G01B21/30 , G01Q10/00 , G01Q10/02 , G01Q10/04 , G01Q10/06 , G01Q20/00 , G01Q20/02 , G01Q30/02 , G01Q30/20 , G01Q60/24 , G01Q60/32 , H01L21/66 , G01B5/28 , H01J3/14
CPC分类号： G01Q10/06 , G01Q10/02 , G01Q20/02 , G01Q60/32 , Y10S977/852
摘要： In order to provide a scanning probe microscope capable of measuring with high throughput distribution information relating to local characteristics of a sample concurrently with accurate three-dimensional shape information of the sample without damaging the sample, the speed of approach to each measurement location is increased by controlling the approach of the sample and probe by the provision of a high-sensitivity proximity sensor of the optical type. Also, additional information relating to the distribution of material quality on the sample can be obtained without lowering the scanning speed by: applying a voltage to the probe, or measuring the response on vibrating the probe, or detecting the local optical intensity of the sample surface concurrently with obtaining sample height data and concurrently with the contact period with the sample, whilst ensuring that the probe is not dragged over the sample, by bringing the probe into contact with the sample intermittently.
摘要翻译：为了提供一种扫描探针显微镜，能够与样品的局部特性相关的高通量分布信息同时测量而不损害样品的准确的三维形状信息，因此，每个测量位置的接近速度通过通过提供光学类型的高灵敏度接近传感器来控制样品和探针的接近。此外，通过以下方式可以获得关于样品的材料质量分布的附加信息，而不降低扫描速度：向探针施加电压，或测量振动探针时的响应，或检测样品表面的局部光强度同时获得样品高度数据，同时与样品的接触期，同时确保探针未被拖动到样品上，通过使探针间断地与样品接触。

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