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    • 4. 发明授权
    • Dynamic random access memory arrays and methods therefor
    • 动态随机存取存储器阵列及其方法
    • US5821592A
    • 1998-10-13
    • US884853
    • 1997-06-30
    • Heinz HoenigschmidJohn DeBrosse
    • Heinz HoenigschmidJohn DeBrosse
    • H01L21/8242H01L27/108H01L29/68
    • H01L27/10805H01L27/10882Y10S257/905Y10S257/907
    • A dynamic random access memory array having an array of memory cells. Individual cells of the array are addressable by a plurality of word lines and a plurality of bit lines. The memory cells are disposed in active areas of the array. The array of memory cells includes a first strip of memory cells. The dynamic random access memory array includes a lower metal layer and an upper metal layer disposed above the lower metal layer. The dynamic random access memory array further includes a dielectric layer disposed between the lower metal layer and the upper metal layer. There is further included a first bit line of the plurality of bit lines which includes a lower metal first bit line portion implemented in the lower metal layer. The lower metal first bit line portion is coupled to a first plurality of memory cells of the first strip of memory cells. The first bit line also includes an upper metal first bit line portion implemented in the upper metal layer. The upper metal first bit line portion is coupled to the lower first metal bit line portion by a first contact through the dielectric layer. The first contact is disposed above one of the active areas.
    • 一种具有存储器单元阵列的动态随机存取存储器阵列。 该阵列的单个单元可由多个字线和多个位线寻址。 存储单元被布置在阵列的有效区域中。 存储单元的阵列包括第一条存储单元。 动态随机存取存储器阵列包括下金属层和设置在下金属层上方的上金属层。 动态随机存取存储器阵列还包括设置在下金属层和上金属层之间的电介质层。 还包括多个位线的第一位线,其包括实现在下金属层中的下金属第一位线部分。 下金属第一位线部分耦合到第一条存储器单元的第一多个存储单元。 第一位线还包括实现在上金属层中的上金属第一位线部分。 上金属第一位线部分通过介电层的第一接触耦合到下部第一金属位线部分。 第一触点设置在有效区域之上。