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81. 发明授权

US5679888A Dynamic quantity sensor and method for producing the same, distortion resistance element and method for producing the same, and angular velocity sensor 失效
标题翻译：动态量传感器及其制造方法，抗变形元件及其制造方法以及角速度传感器
公开(公告)号：US5679888A
公开(公告)日：1997-10-21
申请号：US538577
申请日：1995-10-03
申请人： Takao Tohda , Hiroyuki Kado , Ichiro Tanahashi , Yoshio Manabe , Masaru Yoshida
发明人： Takao Tohda , Hiroyuki Kado , Ichiro Tanahashi , Yoshio Manabe , Masaru Yoshida
IPC分类号： G01B7/16 , G01C19/56 , G01D5/18 , G01K7/22 , G01L1/20 , G01P15/00 , G01P15/08 , G01P15/12 , G01Q10/00 , G01Q20/04 , G01Q60/24 , G01Q60/38 , G01Q70/16 , G01Q90/00 , G01D5/06 , G01B7/34
CPC分类号： G01B7/18 , B82Y35/00 , G01C19/56 , G01K7/226 , G01L1/20 , G01P15/0802 , G01P15/0894 , G01P15/12 , G01Q20/04 , G01P2015/0828
摘要： The dynamic quantity sensor includes an electrically insulating substance layer and at least one pair of electrodes contacting the electrically insulating substance layer, wherein a plurality of conductive particles are dispersed in the electrically insulating substance layer so that a tunnel current flows when a voltage is applied between the at least one pair of electrodes, and a dynamic quantity relating to a distance between the conductive particles is detected based on the tunnel current.
摘要翻译：动态量传感器包括电绝缘物质层和与电绝缘物质层接触的至少一对电极，其中多个导电颗粒分散在电绝缘物质层中，使得当施加电压时隧道电流流动基于隧道电流来检测至少一对电极和与导电粒子之间的距离相关的动态量。

82. 发明授权

US5618760A Method of etching a pattern on a substrate using a scanning probe microscope 失效
标题翻译：使用扫描探针显微镜对基板上的图案进行蚀刻的方法
公开(公告)号：US5618760A
公开(公告)日：1997-04-08
申请号：US311763
申请日：1994-09-23
申请人： Hyongsok Soh , Stephen C. Minne , Calvin F. Quate
发明人： Hyongsok Soh , Stephen C. Minne , Calvin F. Quate
IPC分类号： B81B1/00 , B81B3/00 , B82B3/00 , G01Q10/04 , G01Q20/00 , G01Q60/24 , G01Q60/32 , G01Q70/16 , G01Q80/00 , G03F7/20 , H01L21/31 , H01L21/465
CPC分类号： G03F7/2049 , B82Y35/00 , G01Q20/04 , G01Q60/30 , G03F7/70358 , G03F7/70375 , Y10S148/046 , Y10S438/947 , Y10S438/949 , Y10S977/856
摘要： A scanning probe microscope is used to pattern a layer of resist, and the pattern is transferred to a substrate. First, an underlayer formed of, for example, polyimide and a top layer formed of, for example, amorphous silicon are deposited on the substrate. A pattern is formed on the top layer using the tip of the cantilever in a scanning probe microscope. The pattern may consist of an oxide formed by an electric field at the cantilever tip. The top layer is then etched using the pattern as a mask and using an etchant that is selective against the underlayer. The underlayer is then etched using an etchant that is selective against the top layer and substrate. The substrate is etched with an etchant that removes the top layer but is selective against the underlayer. Finally, the underlayer is removed.
摘要翻译：使用扫描探针显微镜对抗蚀剂层进行图案化，并将图案转印到基底上。首先，由例如聚酰亚胺和由例如非晶硅形成的顶层形成的底层沉积在基板上。在扫描探针显微镜中使用悬臂的尖端在顶层上形成图案。该图案可以由在悬臂尖端处的电场形成的氧化物组成。然后使用图案作为掩模蚀刻顶层，并使用对底层有选择性的蚀刻剂。然后使用对顶层和衬底选择性的蚀刻剂来蚀刻底层。用蚀刻剂蚀刻衬底，除去顶层，但是对底层是选择性的。最后，底层被去除。

83. 发明授权

US5616916A Configuration measuring method and apparatus for optically detecting a displacement of a probe due to an atomic force 失效
标题翻译：用于光学地检测由原子力引起的探头位移的配置测量方法和装置
公开(公告)号：US5616916A
公开(公告)日：1997-04-01
申请号：US563071
申请日：1995-11-27
申请人： Koji Handa , Keishi Kubo , Masateru Doi , Keiichi Yoshizumi
发明人： Koji Handa , Keishi Kubo , Masateru Doi , Keiichi Yoshizumi
IPC分类号： G01B11/00 , G01B21/30 , G01H9/00 , G01H17/00 , G01N37/00 , G01Q10/04 , G01Q20/02 , G01Q20/04 , G01Q60/24 , G01Q80/00 , G02B21/00 , H01J37/28 , H01J3/14
CPC分类号： G01Q60/38 , B82Y35/00 , G01H9/00 , G01Q10/04 , G01Q30/025 , G02B21/0004 , Y10S977/87
摘要： Substantially collimated displacement detection light is led to a first lens and condensed by the first lens to proximities to a reflecting surface of a probe. The reflected light is displaced by an atomic force acting against a surface of a sample, where the reflected light varies in reflection angle according to the displacement. The displaced light is lead to the first lens, changed in direction by a mirror, and detected by magnifying the displacement of the probe. The detection further includes steps of moving a Z direction scan block in a direction vertical to the sample surface by a Z direction driving device, the Z direction scan block having the first lens and the probe, moving an X direction scan block in a first axial direction within a plane parallel to the sample surface by an X direction driving device, the X direction scan block having the Z direction scan block, the Z direction driving device, and the mirror, and moving a Y direction scan block by a Y direction driving device in a second axial direction perpendicular to the first axial direction within a plane parallel to the sample surface, the Y direction scan block having the X direction scan block, the X direction driving device, the detection light radiation system, and the displacement detection system.
摘要翻译：基本上准直的位移检测光被引导到第一透镜，并且被第一透镜聚光到探针的反射表面。反射光被作用在样品表面上的原子力移位，其中反射光根据位移以反射角度变化。偏移的光线通过第一透镜，通过镜子改变方向，并且通过放大探针的位移来检测。该检测还包括以下步骤：通过Z方向驱动装置使Z方向扫描块沿垂直于样品表面的方向移动，Z方向扫描块具有第一透镜和探头，沿X方向扫描块移动第一轴向通过X方向驱动装置在与样品表面平行的平面内的方向，具有Z方向扫描块的X方向扫描块，Z方向驱动装置和反射镜，并且通过Y方向驱动来移动Y方向扫描块在垂直于第一轴向的第二轴向方向的平面内的装置，具有X方向扫描块的Y方向扫描块，X方向驱动装置，检测光辐射系统和位移检测系统。

84. 发明授权

US5560244A Scanning stylus atomic force microscope with cantilever tracking and optical access 失效
公开(公告)号：US5560244A
公开(公告)日：1996-10-01
申请号：US416100
申请日：1995-04-04
申请人： Craig B. Prater , James Massie , David A. Grigg , Virgil B. Elings , Paul K. Hansma , Barney Drake
发明人： Craig B. Prater , James Massie , David A. Grigg , Virgil B. Elings , Paul K. Hansma , Barney Drake
IPC分类号： G01B21/30 , G01Q20/00 , G01Q20/02 , G01Q30/06 , G01Q30/12 , G01Q40/00 , G01Q60/24 , G01Q60/38 , G01B5/28
CPC分类号： G01Q60/38 , B82Y35/00 , G01Q20/02 , Y10S977/87
摘要： A scanned-stylus atomic force microscope (AFM) employing the optical lever technique, and method of operating the same. The AFM of the invention includes a light source and a scanned optical assembly which guides a light beam emitted from the laser source onto a point on said cantilever during scanning thereof. A moving laser beam is thus created which will automatically track the movement of the cantilever during scanning. The invention also allows the laser beam to be used to measure, calibrate or correct the motion of the scanning mechanism, and further allows viewing of the sample and cantilever using an optical microscope.

85. 发明授权

US5533387A Method of evaluating silicon wafers 失效
标题翻译：评估硅片的方法
公开(公告)号：US5533387A
公开(公告)日：1996-07-09
申请号：US528007
申请日：1995-09-14
申请人： Ken Aihara , Yutaka Kitagawara , Takao Takenaka
发明人： Ken Aihara , Yutaka Kitagawara , Takao Takenaka
IPC分类号： H01L21/66 , G01B7/34 , G01B11/24 , G01Q30/08 , G01Q30/20 , G01Q60/24
CPC分类号： G01Q30/04 , B82Y35/00 , G01B7/34 , Y10S977/854
摘要： The height x.sub.i (i=1, 2, . . . , N) of a plurality of measuring points on a silicon wafer from a reference plane is measured by means of an AFM (atomic force microscope), the autocorrelation function R.sub.j represented by the equation below is determined: ##EQU1## Where x denotes: ##EQU2## is determined, an arbitrary number of autocorrelation function R.sub.j with large value from said autocorrelation function R.sub.j are selected, and the microroughness on said silicon wafer is analyzed based on the distances between the point R.sub.j=0 and said selected points R.sub.j 's with large value except for R.sub.j=0.
摘要翻译：通过AFM（原子力显微镜）测量硅晶片上的多个测量点与参考平面的高度xi（i = 1,2，...，N），由相关的自相关函数Rj 确定下式：确定，选择具有来自所述自相关函数Rj的大值的任意数量的自相关函数Rj，并且基于点Rj = 0与所选择的点Rj的距离来分析所述硅晶片上的微粗糙度除了Rj = 0，其值很大。

86. 发明授权

US5503010A Directional atomic force microscope and method of observing a sample with the microscope 失效
标题翻译：定向原子力显微镜和用显微镜观察样品的方法
公开(公告)号：US5503010A
公开(公告)日：1996-04-02
申请号：US338179
申请日：1994-11-09
申请人： Kazushi Yamanaka
发明人： Kazushi Yamanaka
IPC分类号： G01B21/30 , G01B5/28 , G01N37/00 , G01Q10/06 , G01Q30/04 , G01Q60/24 , G01Q60/26 , G01Q60/28 , G01Q60/32 , G01Q60/34 , H01J37/28
CPC分类号： G01Q60/32 , B82Y35/00 , G01Q60/26 , Y10S977/851 , Y10S977/852
摘要： An atomic force microscope includes a vibrator which imparts vibration between a probe and a sample such that a relative vertical vibration and a relative lateral vibration are superimposed. A method of observing a sample with the microscope includes the steps of imparting phase-controlled vertical and lateral vibration between a sample and a probe so that the probe moves along a straight line or a ring relative to the sample, controlling the direction of the straight line or the ring, and measuring the amplitude and/or the phase of the bending vibration and/or the torsional vibration of a cantilever excited by the vibration.
摘要翻译：原子力显微镜包括振动器，其在探针和样品之间施加振动，使得叠加相对垂直振动和相对横向振动。用显微镜观察样品的方法包括以下步骤：在样品和探针之间施加相位控制的垂直和横向振动，使得探针相对于样品沿着直线或环移动，控制直线的方向线或环，并且测量由振动激励的悬臂的弯曲振动和/或扭转振动的振幅和/或相位。

87. 发明授权

US5489339A Microelectronic processing machine 失效
标题翻译：微电子加工机
公开(公告)号：US5489339A
公开(公告)日：1996-02-06
申请号：US208145
申请日：1994-03-10
申请人： Takeo Hattori , Masatoshi Yasutake
发明人： Takeo Hattori , Masatoshi Yasutake
IPC分类号： H01L21/316 , C23C16/04 , G01Q30/02 , G01Q30/10 , G01Q30/12 , G01Q60/24 , G01Q80/00 , H01L21/318 , C23C16/00
CPC分类号： C23C16/047 , Y10S977/855
摘要： An electrode capable of pushing against a silicon substrate with a constant force is mounted inside a vacuum chamber or a gas-replacing chamber. A bias voltage source can supply a given electrical current between the silicon substrate and the electrode. A temperature-controlled heater and a positioning mechanism are mounted under the silicon substrate. A gas inlet nozzle for adjusting the ambient is mounted close to the location of the substrate.
摘要翻译：能够以恒定的力推压硅衬底的电极安装在真空室或气体置换室内。偏置电压源可以在硅衬底和电极之间提供给定的电流。温度控制加热器和定位机构安装在硅衬底下方。用于调节环境的气体入口喷嘴安装在基板的位置附近。

88. 发明授权

US5468959A Scanning probe microscope and method for measuring surfaces by using this microscope 失效
标题翻译：扫描探针显微镜和使用该显微镜测量表面的方法
公开(公告)号：US5468959A
公开(公告)日：1995-11-21
申请号：US210397
申请日：1994-03-18
申请人： Takao Tohda , Hiroyuki Kado , Shinichi Yamamoto
发明人： Takao Tohda , Hiroyuki Kado , Shinichi Yamamoto
IPC分类号： G01B5/28 , G01B7/34 , G01B21/30 , G01N27/00 , G01N37/00 , G01Q10/04 , G01Q20/02 , G01Q30/02 , G01Q30/04 , G01Q60/04 , G01Q60/10 , G01Q60/24 , G11B9/14 , H01J37/28
CPC分类号： G01Q10/06 , B82Y35/00 , G01Q60/04 , Y10S977/851
摘要： A microscope comprises a cantilever having a distal end equipped with an electrically conductive probe allowing current to flow and having a fine tip whose voltage is controllable, a position control mechanism for controlling position of a sample with respect to a base end of the cantilever, a small displacement measuring mechanism for measuring a deflection amount of the cantilever, and a deflection control mechanism for controlling deflection of the cantilever so as to adjust a distance between the fine tip of the probe and the sample. A method for measuring surfaces using this novel microscope comprises steps of: maintaining deflection of the cantilever at a constant value by using the small displacement measuring mechanism and the deflection control mechanism; applying a constant voltage between the electrically conductive probe and the sample; scanning the sample along surface of the sample with the probe, while a tunneling current is maintained at a constant value by using the position control mechanism; and measuring a control amount of the position control mechanism in a direction vertical to the sample and a control amount of the deflection control mechanism.
摘要翻译：显微镜包括具有远端的悬臂，其具有允许电流流动并具有可控电压的细尖端的导电探针，用于控制样品相对于悬臂的基端的位置的位置控制机构，用于测量悬臂的偏转量的小位移测量机构，以及用于控制悬臂的偏转的偏转控制机构，以调节探针的细尖端与样品之间的距离。使用这种新型显微镜测量表面的方法包括以下步骤：通过使用小位移测量机构和偏转控制机构来将悬臂的偏转维持在恒定值; 在导电探针和样品之间施加恒定电压; 用探头沿着样品的表面扫描样品，同时通过使用位置控制机构将隧道电流维持在恒定值; 并且在垂直于样品的方向和偏转控制机构的控制量中测量位置控制机构的控制量。

89. 发明授权

US5461907A Imaging, cutting, and collecting instrument and method 失效
标题翻译：成像，切割和收集仪器和方法
公开(公告)号：US5461907A
公开(公告)日：1995-10-31
申请号：US35741
申请日：1993-03-23
申请人： Robert J. Tench , Wigbert J. Siekhaus , Mehdi Balooch , Rodney L. Balhorn , Michael J. Allen
发明人： Robert J. Tench , Wigbert J. Siekhaus , Mehdi Balooch , Rodney L. Balhorn , Michael J. Allen
IPC分类号： G01Q60/24 , G01Q60/38 , H01J3/14
CPC分类号： G01Q60/38 , B82Y35/00 , G01Q70/10 , Y10S977/856
摘要： Instrumentation and techniques to image small objects, such as but not limited to individual human chromosomes, with nanometer resolution, to cut-off identified parts of such objects, to move around and manipulate such cut-off parts on the substrate on which they are being imaged to predetermined locations on the substrate, and to remove the cut-off parts from the substrate. This is accomplished using an atomic force microscope (AFM) and by modification of the conventional cantilever stylus assembly of an AFM, such that plural cantilevers are used with either sharp-tips or knife-edges thereon. In addition, the invention can be utilized for measuring hardness of materials.
摘要翻译：用于将小物体（例如但不限于单个人类染色体）以纳米分辨率成像的仪器和技术，以截断所述物体的识别部分，以移动并操纵其正在其上的基底上的这种截止部分成像到基板上的预定位置，并从基板去除截止部分。这是使用原子力显微镜（AFM）和通过修改AFM的常规悬臂测针组件来实现的，使得在其上使用尖锐尖端或刀刃的多个悬臂。此外，本发明可用于测量材料的硬度。

90. 发明授权

US5436448A Surface observing apparatus and method 失效
标题翻译：表面观测装置及方法
公开(公告)号：US5436448A
公开(公告)日：1995-07-25
申请号：US1250
申请日：1993-01-06
申请人： Sumio Hosaka , Atsushi Kikugawa , Yukio Honda , Hajime Koyanagi , Shigeyuki Hosoki , Tsuyoshi Hasegawa
发明人： Sumio Hosaka , Atsushi Kikugawa , Yukio Honda , Hajime Koyanagi , Shigeyuki Hosoki , Tsuyoshi Hasegawa
IPC分类号： G01B7/34 , G01Q10/00 , G01Q20/02 , G01Q60/02 , G01Q60/08 , G01Q60/24 , G01Q60/26 , G01Q60/32 , G11B5/00 , G11B11/00 , H01J37/00
CPC分类号： G01Q20/02 , B82Y10/00 , B82Y35/00 , G01Q60/02 , G01Q60/08 , G01Q60/26 , G01Q60/32 , G11B11/007 , G11B5/00 , G11B9/1409 , G11B2005/0002 , G11B2005/0005 , Y10S977/849 , Y10S977/851 , Y10S977/852 , Y10S977/873 , Y10S977/953
摘要： A surface observing apparatus for obtaining information of a specimen comprises a probe disposed in the close vicinity of the specimen, a deformable cantilever for holding the probe, a scanning mechanism for scanning a surface of the specimen with the probe and a detector for detecting displacements of the cantilever to thereby allow information of the specimen to be derived on the basis of the displacement of the cantilever. The apparatus further comprises a first detector for detecting a force acting on the probe from the displacement of the cantilever, and a second detector for measuring a change in the force acting on the probe on the basis of the displacement of the cantilever.
摘要翻译：用于获取样本信息的表面观察装置包括设置在样本附近的探针，用于保持探针的可变形悬臂，用于用探针扫描样本表面的扫描机构和用于检测位移的检测器悬臂，从而允许基于悬臂的位移导出样本的信息。该装置还包括第一检测器，用于根据悬臂的位移检测作用在探针上的力;以及第二检测器，用于根据悬臂的位移来测量作用在探针上的力的变化。

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