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61. 发明申请

US20130153782A1 Multi-axis Magnetic Lens for Focusing a Plurality of Charged Particle Beams 有权
标题翻译：用于聚焦多个带电粒子束的多轴磁镜
公开(公告)号：US20130153782A1
公开(公告)日：2013-06-20
申请号：US13464261
申请日：2012-05-04
申请人： Weiming Ren , Zhongwei Chen
发明人： Weiming Ren , Zhongwei Chen
IPC分类号： H01J3/20 , H01F7/02
CPC分类号： H01J37/14 , B82Y10/00 , B82Y40/00 , H01J3/20 , H01J37/141 , H01J37/145 , H01J37/3177 , H01J2237/1035 , H01J2237/1415 , H01J2237/31774
摘要： The present invention provides two ways to form a special permeability-discontinuity unit inside every sub-lens of a multi-axis magnetic lens, which either has a simpler configuration or has more flexibility in manufacturing such as material selection and mechanical structure. Accordingly several types of multi-axis magnetic lens are proposed for various applications. One type is for general application such as a multi-axis magnetic condenser lens or a multi-axis magnetic transfer lens, another type is a multi-axis magnetic non-immersion objective which can require a lower magnetomotive force, and one more type is a multi-axis magnetic immersion objective lens which can generate smaller aberrations. Due to using permeability-discontinuity units, every multi-axis magnetic lens in this invention can also be electrically excited to function as a multi-axis electromagnetic compound lens so as to further reduce aberrations thereof and/or realize electron beam retarding for low-voltage irradiation on specimen.
摘要翻译：本发明提供了在多轴磁性透镜的每个子透镜内部形成特殊的渗透率不连续单元的两种方式，其具有更简单的构造或者在诸如材料选择和机械结构的制造中具有更大的灵活性。因此，针对各种应用提出了几种类型的多轴磁性透镜。一种用于一般应用，例如多轴磁聚焦透镜或多轴磁性转印透镜，另一种类型是可能需要较低磁动势的多轴磁性非浸没物镜，另外一种类型是可以产生较小像差的多轴磁浸物镜。由于使用导磁率不连续单位，本发明中的每个多轴磁性透镜也可以被电激励以用作多轴电磁复合透镜，以便进一步降低其像差和/或实现低电压的电子束延迟对样品照射

62. 发明申请

US20120318978A1 Monochromator for Charged Particle Beam Apparatus 有权
标题翻译：用于带电粒子束装置的单色器
公开(公告)号：US20120318978A1
公开(公告)日：2012-12-20
申请号：US13551947
申请日：2012-07-18
申请人： WEIMING REN , ZHONGWEI CHEN
发明人： WEIMING REN , ZHONGWEI CHEN
IPC分类号： H01J3/26 , H01J37/26
CPC分类号： H01J37/05 , H01J37/21 , H01J37/28 , H01J2237/057 , H01J2237/1508 , H01J2237/1532
摘要： The monochromator for reducing energy spread of a primary charged particle beam in charged particle apparatus comprises a beam adjustment element, two Wien-filter type dispersion units and an energy-limit aperture. In the monochromator, a dual proportional-symmetry in deflection dispersion and fundamental trajectory along a straight optical axis is formed, which not only fundamentally avoids incurring off-axis aberrations that actually can not be compensated but also ensures the exit beam have a virtual crossover which is stigmatic, dispersion-free and inside the monochromator. The present invention also provides two ways to build a monochromator into a SEM, in which one is to locate a monochromator between the electron source and the condenser, and another is to locate a monochromator between the beam-limit aperture and the objective. The former provides an additional energy-angle depending filtering, and obtains a smaller effective energy spread.
摘要翻译：用于减少带电粒子装置中的初级带电粒子束的能量扩散的单色仪包括光束调节元件，两个维恩滤波器型色散单元和能量限制孔径。在单色仪中，形成了沿着直线光轴的偏转色散和基本轨迹中的双比例对称性，其不仅从根本上避免了实际上不能被补偿的偏轴像差，而且确保出射光束具有虚拟交叉，是单色的，是无色的，不分散的。本发明还提供了将单色仪构建到SEM中的两种方法，其中一种是在电子源和电容器之间定位单色器，另一种是在光束极限孔径和物镜之间定位单色仪。前者提供额外的能量角取决于滤波，并获得较小的有效能量扩展。

63. 发明授权

US08247136B2 Carbon based electrocatalysts for fuel cells 失效
标题翻译：用于燃料电池的碳基电催化剂
公开(公告)号：US08247136B2
公开(公告)日：2012-08-21
申请号：US11376768
申请日：2006-03-15
申请人： Yushan Yan , Xin Wang , Wenzhen Li , Mahesh Waje , Zhongwei Chen , William Goddard , Wei-Qiao Deng
发明人： Yushan Yan , Xin Wang , Wenzhen Li , Mahesh Waje , Zhongwei Chen , William Goddard , Wei-Qiao Deng
IPC分类号： H01M4/02 , H01M4/36 , H01M4/92 , H01M8/00 , B05D5/12
CPC分类号： H01M4/881 , H01M4/8605 , H01M4/92 , H01M4/926 , H01M8/1004 , H01M8/1011 , Y02E60/523
摘要： Novel proton exchange membrane fuel cells and direct methanol fuel cells with nanostructured components are configured with higher precious metal utilization rate at the electrodes, higher power density, and lower cost. To form a catalyst, platinum or platinum-ruthenium nanoparticles are deposited onto carbon-based materials, for example, single-walled, dual-walled, multi-walled and cup-stacked carbon nanotubes. The deposition process includes an ethylene glycol reduction method. Aligned arrays of these carbon nanomaterials are prepared by filtering the nanomaterials with ethanol. A membrane electrode assembly is formed by sandwiching the catalyst between a proton exchange membrane and a diffusion layer that form a first electrode. The second electrode may be formed using a conventional catalyst. The several layers of the MEA are hot pressed to form an integrated unit. Proton exchange membrane fuel cells and direct methanol fuel cells are developed by stacking the membrane electrode assemblies in a conventional manner.
摘要翻译：新型质子交换膜燃料电池和具有纳米结构组分的直接甲醇燃料电池配置在电极上的贵金属利用率更高，功率密度更高，成本更低。为了形成催化剂，将铂或铂 - 钌纳米颗粒沉积在碳基材料上，例如单壁，双壁，多壁和杯堆叠碳纳米管。沉积工艺包括乙二醇还原法。通过用乙醇过滤纳米材料来制备这些碳纳米材料的对准阵列。通过将催化剂夹在质子交换膜和形成第一电极的扩散层之间形成膜电极组件。第二电极可以使用常规的催化剂形成。 MEA的几层被热压形成一个集成的单元。质子交换膜燃料电池和直接甲醇燃料电池通过以常规方式堆叠膜电极组件来开发。

64. 发明申请

US20110291007A1 Movable Detector for Charged Particle Beam Inspection or Review 有权
标题翻译：用于带电粒子束检测或检查的可移动检测器
公开(公告)号：US20110291007A1
公开(公告)日：2011-12-01
申请号：US12787139
申请日：2010-05-25
申请人： YI-XIANG WANG , JOE WANG , XUEDONG LIU , ZHONGWEI CHEN
发明人： YI-XIANG WANG , JOE WANG , XUEDONG LIU , ZHONGWEI CHEN
IPC分类号： G01N23/22 , H01J37/244
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/024 , H01J2237/24465 , H01J2237/24475 , H01J2237/2448 , H01J2237/24495 , H01J2237/2611 , H01J2237/2817
摘要： The present invention generally relates to a detection unit of a charged particle imaging system. More particularly, portion of the detection unit can move into or out of the detection system as imaging condition required. With the assistance of a Wein filter (also known as an E×B charged particle analyzer) and a movable detector design, the present invention provides a stereo imaging system that suitable for both low current, high resolution mode and high current, high throughput mode. Merely by way of example, the invention has been applied to a scanning electron beam inspection system. But it would be recognized that the invention could apply to other system using charged particle beam as an observation tool.
摘要翻译：本发明一般涉及带电粒子成像系统的检测单元。更具体地，检测单元的一部分可以作为所需的成像条件移入或移出检测系统。在Wein滤波器（也称为E×B带电粒子分析仪）和可移动检测器设计的帮助下，本发明提供了一种适用于低电流，高分辨率模式和高电流，高通量模式的立体成像系统。仅作为示例，本发明已经应用于扫描电子束检查系统。但是应当认识到，本发明可以应用于使用带电粒子束作为观测工具的其它系统。

65. 发明申请

US20100102227A1 ELECTRON BEAM APPARATUS 有权
标题翻译：电子束设备
公开(公告)号：US20100102227A1
公开(公告)日：2010-04-29
申请号：US12257304
申请日：2008-10-23
申请人： ZHONGWEI CHEN , WEIMING REN , JOE WANG , XUEDONG LIU , JUYING DOU , FUMIN HE , FENG CAO , YAN REN , XIAOLI GUO , WEI HE , QINGPO XI
发明人： ZHONGWEI CHEN , WEIMING REN , JOE WANG , XUEDONG LIU , JUYING DOU , FUMIN HE , FENG CAO , YAN REN , XIAOLI GUO , WEI HE , QINGPO XI
IPC分类号： G01N23/00 , H01J3/20
CPC分类号： H01J37/073 , H01J37/244 , H01J37/28 , H01J2237/06341 , H01J2237/24592
摘要： The present invention relates to a charged particle beam apparatus which employs a scanning electron microscope for sample inspection and defect review.The present invent provides solution of improving imaging resolution by utilizing a field emission cathode tip with a large tip radius, applying a large accelerating voltage across ground potential between the cathode and anode, positioning the beam limit aperture before condenser lens, utilizing condenser lens excitation current to optimize image resolution, applying a high tube bias to shorten electron travel time, adopting and modifying SORIL objective lens to ameliorate aberration at large field of view and under electric drifting and reduce the urgency of water cooling objective lens while operating material analysis.The present invent provides solution of improving throughput by utilizing fast scanning ability of SORIL and providing a large voltage difference between sample and detectors.
摘要翻译：本发明涉及采用扫描电子显微镜进行样品检查和缺陷检查的带电粒子束装置。本发明提供了通过利用具有大的尖端半径的场致发射阴极尖端来提高成像分辨率的解决方案，在阴极和阳极之间的地电位上施加大的加速电压，将光束极限孔定位在聚光透镜之前，利用聚光透镜激发电流优化图像分辨率，应用高管偏压缩短电子行进时间，采用和修正SORIL物镜，以改善大视野和电漂移下的像差，并减少水冷物镜在操作材料分析时的紧迫性。本发明提供了通过利用SORIL的快速扫描能力并在样品和检测器之间提供大的电压差来提高产量的解决方案。

66. 发明申请

US20080121810A1 SYSTEM AND METHOD FOR A CHARGED PARTICLE BEAM 有权
标题翻译：充电颗粒束的系统和方法
公开(公告)号：US20080121810A1
公开(公告)日：2008-05-29
申请号：US11923012
申请日：2007-10-24
申请人： Xuedong Liu , Xu Zhang , Joe Wang , Edward Tseng , Zhongwei Chen
发明人： Xuedong Liu , Xu Zhang , Joe Wang , Edward Tseng , Zhongwei Chen
IPC分类号： H01J1/50
CPC分类号： H01J37/145 , H01J37/28 , H01J2237/0475 , H01J2237/12 , H01J2237/14 , H01J2237/24485 , H01J2237/2807
摘要： System and method for charged particle beam. According an embodiment, the present invention provides a charged particle beam apparatus. The apparatus includes a charged particle source for generating a primary charged particle beam. The apparatus also includes at least one condenser lens for pre-focusing the primary charge particle beam. Furthermore, the apparatus includes a compound objective lens for forming the magnetic field and the electrostatic field to focus the primary charged particle beam onto a specimen in the charged particle beam path. The specimen includes a specimen surface. The compound objective lens includes a conical magnetic lens, an immersion magnetic lens, and an electrostatic lens, the conical magnetic lens including an upper pole piece, a shared pole piece being electrically insulated from the upper pole piece, and an excitation coil.
摘要翻译：带电粒子束的系统和方法。根据实施例，本发明提供一种带电粒子束装置。该装置包括用于产生初级带电粒子束的带电粒子源。该装置还包括用于预聚焦初级充电粒子束的至少一个聚光透镜。此外，该装置包括用于形成磁场的复合物镜和静电场，以将初级带电粒子束聚焦到带电粒子束路径中的样本上。样品包括样品表面。复合物镜包括锥形磁性透镜，浸没式磁透镜和静电透镜，该圆锥形磁性透镜包括上极片，与上极片电绝缘的共用极片和励磁线圈。

67. 发明授权

US11328898B2 Digital detector, apparatus of charged-particle beam such as electron microscope comprising the same, and method thereof 有权
公开(公告)号：US11328898B2
公开(公告)日：2022-05-10
申请号：US17305514
申请日：2021-07-08
申请人： Zhongwei Chen , Xiaoming Chen , Daniel Tang , Liang-Fu Fan
发明人： Zhongwei Chen , Xiaoming Chen , Daniel Tang , Liang-Fu Fan
IPC分类号： H01J37/244 , H01J37/28 , H01J37/22
摘要： The present invention provides a digital high-resolution detector for detecting X-ray, UV light or charged particles. In various embodiments, the digital detector comprises an array of CMOS or CCD pixels and a layer of conversion material on top of the array designed for converting incident X-ray, UV light or charged particles into photons for CMOS or CCD sensors to capture. The thin and high-resolution detector of the invention is particularly useful for monitoring and aligning beams in, and optimizing system performance of, an apparatus of charged-particle beam e.g. an electron microscope.

68. 发明申请

US20220108443A1 RAPID AND AUTOMATIC VIRUS IMAGING AND ANALYSIS SYSTEM AS WELL AS METHODS THEREOF 有权
公开(公告)号：US20220108443A1
公开(公告)日：2022-04-07
申请号：US17452999
申请日：2021-10-31
申请人： Zhongwei Chen , Xiaoming Chen , Daniel Tang , Liang-Fu Fan
发明人： Zhongwei Chen , Xiaoming Chen , Daniel Tang , Liang-Fu Fan
IPC分类号： G06T7/00 , G06T7/50 , H01J37/28
摘要： A rapid and automatic virus imaging and analysis system includes (i) electron optical sub-systems (EOSs), each of which has a large field of view (FOV) and is capable of instant magnification switching for rapidly scanning a virus sample; (ii) sample management sub-systems (SMSs), each of which automatically loads virus samples into one of the EOSs for virus sample scanning and then unloads the virus samples from the EOS after the virus sample scanning is completed; (iii) virus detection and classification sub-systems (VDCSs), each of which automatically detects and classifies a virus based on images from the EOS virus sample scanning; and (iv) a cloud-based collaboration sub-system for analyzing the virus sample scanning images, storing images from the EOS virus sample scanning, and storing and analyzing machine data associated with the EOSs, the SMSs, and the VDCSs.

69. 发明申请

US20160351371A1 SCANNING TRANSMISSION ELECTRON MICROSCOPE WITH VARIABLE AXIS OBJECTIVE LENS AND DETECTIVE SYSTEM 有权
标题翻译：扫描传输电子显微镜与可变轴目标镜头和检测系统
公开(公告)号：US20160351371A1
公开(公告)日：2016-12-01
申请号：US14940102
申请日：2015-11-12
申请人： Shuai Li , Wei He , Zhongwei Chen
发明人： Shuai Li , Wei He , Zhongwei Chen
IPC分类号： H01J37/145 , H01J37/28 , H01J37/21 , H01J37/147
CPC分类号： H01J37/145 , H01J37/1477 , H01J37/21 , H01J37/28 , H01J2237/0473 , H01J2237/2802
摘要： The present invention provides a scanning transmission electron microscope (STEM). In the STEM, a specimen is sandwiched between a variable axis objective lens and a variable axis collection lens. The axis of the collection lens varies along with the variation of the objective lens axis in a coordinated manner. The STEM of the invention exhibits technical merits such as large scanning field, high image resolution across the entire scanning field, and high throughput, among others.
摘要翻译：本发明提供扫描透射电子显微镜（STEM）。在STEM中，将样本夹在可变轴物镜和可变轴收集透镜之间。收集透镜的轴线随着物镜轴的协调变化而变化。本发明的STEM具有如扫描场大，整个扫描场的高图像分辨率，高通量等技术优点。

70. 发明申请

US20160322645A1 SINGLE LAYER AIR ELECTRODE AND PROCESSES FOR THE PRODUCTION THEREOF 审中-公开
标题翻译：单层空气电极及其生产工艺
公开(公告)号：US20160322645A1
公开(公告)日：2016-11-03
申请号：US15106222
申请日：2014-12-17
申请人： Zhongwei Chen , Dong Un Lee
发明人： Zhongwei Chen , Dong Un Lee
IPC分类号： H01M4/90 , H01M12/08 , H01M12/06 , H01M4/86 , H01M4/88
CPC分类号： H01M4/9016 , C25B11/035 , H01M4/8615 , H01M4/8652 , H01M4/8668 , H01M4/8673 , H01M4/8828 , H01M4/8896 , H01M12/06 , H01M12/08 , H01M2004/8689 , Y02E60/128
摘要： A single layer air electrode comprising a porous active catalyst framework. The porous active catalyst framework comprises metallic macroparticles, an active catalyst, a substrate and a binder. The porous active catalyst framework acting as both the active catalyst layer and the gas diffusion layer.
摘要翻译：包含多孔活性催化剂骨架的单层空气电极。多孔活性催化剂骨架包括金属大颗粒，活性催化剂，底物和粘合剂。用作活性催化剂层和气体扩散层的多孔活性催化剂骨架。

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